HT Series II Inert Gas Purge
8 10-1474 Issue 3-6 March 2014
Reset
The inert gas purge system will reset if the inert gas pressure decays below the safe
operating threshold during the purge cycle. The RESET LED lights up to indicate the system
has reset (the RESET LED also lights up if the CANCEL button has been pressed).
Pressure gauges
The CHAMBER PURGE pressure and PUMP BLEED pressure can be monitored using the
pressure gauges on front of the inert gas purge box.
In addition to the N
2
OK LED, the pressure gauges on the control module provide an
indication of the inert gas supply pressure throughout the purge process.
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