HT Series II Inert Gas Purge
16 10-1474 Issue 3-6 March 2014
Connections to vacuum pump
For nXDS6i vacuum pumps, connect the Pump bleed hose to the pump ballast adapter and
connect the chamber exhaust hose to a T-piece, fitted to the pump vacuum inlet.
Pump ballast adapter (nXDS6i pump)
For older systems with XDS5 vacuum pumps, the pump bleed connects to a fitting under the
pump control box moulding.
Chamber exhaust connected to T-piece (pump vacuum inlet)
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