HSD130 SETUP
3j-2 CommandTHC for X-Y Table Instruction Manual
11
Remove the cover and the rear panel
DANGER
ELECTRIC SHOCK CAN KILL
Turn off all electrical power before removing the power supply cover. Press the power
supply OFF (0) pushbutton switch and set the line disconnect switch to OFF. In the
U.S., use a “lock-out and tag-out” procedure until the service or maintenance is
complete. In other countries, follow appropriate local or national safety procedures.
See Figure 3j-1 and 3j-2.
Remove the cover from the plasma interface assembly.
Remove the rear panel from the powe supply