Rev 2015-03-02 12
GV10x OPERATION AND SAFETY MANUAL
3. Installing
3.1. Facilities Requirements
See Appendix A: Technical Specifications.
3.2. Connect GV10x Source to Vacuum Chamber
3.2.1. Vent host vacuum chamber to be cleaned.
3.2.2. If applicable, attach the Spooler shipped with the GV10x onto the appropriate
chamber port. ibss Group provides a variety of Spoolers which can be attached to
various ports on SEMs and other analytical vacuum systems.
3.2.3. Mount the GV10x Source to the spooler KF40 fitting.
3.2.4. Pump the chamber down to operating pressure.
3.2.5. If the pump-down time is approximately the same as usual pump-down time, then
there are no leaks and the Source and Spooler have been mounted correctly.
NOTES ON GV10x SOURCE INSTALLATION
The Source can be operated in any position to suit adjacent component geometry
on the vacuum chamber.
It is recommended to mount the Source so downstream products from the plasma
enter the vacuum chamber straight without bends.
Silver braided wires should be moved away from the downstream flow since silver
will quickly oxidize.
The volume between the Source location and the pump port is the volume most
readily cleaned.
The source can be moved to different chamber location if the volume to be cleaned
is greater than 1.5 cubic meters.
SAFETY CHECK: The electron gun isolation valve should be closed and/or all
detectors and active components shut down before turning on the GV10x.
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