Rev 2015-03-02 13
GV10x OPERATION AND SAFETY MANUAL
3.3. Connect GV10x Source to Controller
The following hazardous energies are associated with the GV10x Source:
electrical power, RF, and UV/IR. Proper care and caution should be observed
before supplying power and during use.
3.3.1. Connect RF coax cable to the Controller
and Source back panels.
3.3.2. Connect the Control cable with 15-pin
D-sub connector to Controller and Source back
panels.
3.3.3. Plug 110-240VAC line cord to power
inlet socket on Controller back panel and to an
appropriate AC power source. The AC power
source may be controlled by the host system’s
EMO circuit. Regardless of the AC power
source, be sure the Controller is oriented such that the rear panel remains accessible
for easy removal of the power cord from the Controller if and when necessary.
3.3.4. (Optional) If a Pirani or Pfeiffer gauge is supplied on the Spooler (Figure 3-2),
plug connecting pressure gauge cable into the back of the Source. The cable can be
inserted in either orientation into the matching connection slot, found directly above the
connection for the 15-pin D-sub connector.
3.3.5. (Optional) Connect a Serial-to-USB Cable from the Controller (RS232 COM
port) to a PC on which the provided Remote Control Software (GUI) has been installed.
3.4. Select Ashing Gas
Room air is commonly selected for ashing gas phase HC contamination and lightly
contaminated surfaces.
An O
2
/Ar (95%/5%) gas mixture is frequently necessary to remove heavily contaminated
carbon deposits on surfaces of optical components and Si mirrors. In this case connect a
S/S two-stage regulator from the gas bottle to the inlet Source filter. Set the regulator
delivery pressure between 1 to 2 psig. Additionally, hydrogen gas mixtures may be used
if oxygen sensitive samples and equipment are present in the chamber during cleaning.
It is important to clear the use of oxygen gas with your health and safety officials
before proceeding.
Figure 3-1. Source and BT (benchtop)
Controller Back Panels
Figure 3-2. Source, Spooler and Pirani Gauge Assembly.
Source shows Pirani Gauge mounted on
Spooler fitted with KF40 flanges on both
sides.
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