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General| Brand | ibss Group, Inc. |
|---|---|
| Model | GV10 Downstream Asher Series |
| Category | Controller |
| Language | English |
Details the intended use and function of the GV10x Downstream Asher for hydrocarbon contamination removal.
Describes the two physical components of the GV10x System: the Source and the Controller.
Compares the BT and 2U GV10x Controller models, detailing their features and differences.
Details the P3, P4, and P5 GV10x Source models, including their dimensions and capabilities.
Provides instructions for visually inspecting the GV10x components upon arrival and retaining packing materials.
Outlines the procedure for repacking GV10x components for return shipment, including RMA requirements.
Details guidelines for recycling the GV10x DS Asher at the end of its lifecycle.
Refers to Appendix A for technical specifications related to facilities requirements for the GV10x.
Step-by-step guide for mounting the GV10x Source to a vacuum chamber and verifying correct installation.
Details the hazardous energies and connection steps for linking the GV10x Source and Controller.
Explains the selection of appropriate ashing gases like room air or O2/Ar mixtures and safety considerations.
Describes methods for setting operating parameters via the BT Controller front panel or remote software.
Details the process of setting operating parameters using the GV10x-BT controller's front panel interface.
Explains how to set GV10x operating parameters using remote control software via a PC connection.
Provides step-by-step instructions for operating the GV10x Downstream Asher, including plasma ignition.
Guides users on tuning the GV10x Source to minimize reflected power and maximize delivered power.
Explains how to adjust the operating pressure of the GV10x Asher using the Variable Constriction Needle Valve.
Details the orderly procedure for shutting down the GV10x equipment.
Describes the steps for locking out energy isolating devices for safety during maintenance or repair.
Outlines the steps for safely releasing the GV10x from an isolated state and returning it to service.
Lists detailed technical specifications for the GV10x Plasma Source models.
Provides technical specifications for the GV10x RF Controller models.
Details hazards present within the Controller and Source enclosures and recommended safety procedures.
Explains the meaning and location of various warning and caution alerts on the GV10x equipment.
Specifies inspection requirements for the GV10x Source and Controller on a daily and periodic basis.
Describes the GV10x safety interlock system, its location, hazards protected, and activation conditions.
Specifies the experience level required for operating the GV10x and the necessary training.
Provides contact details for ibss Group Customer Service for emergencies or inquiries.
Advises adherence to local and national codes for safe installation and operation.
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