ibss Group, Inc. GV10 Downstream Asher Series User Manual

Rev 2015-03-02 5
ibss Group
GV10x OPERATION AND SAFETY MANUAL
TABLE OF CONTENTS
Sections
1. Introduction ............................................................................................................................. 7
1.1 About the GV10x ......................................................................................................................... 7
1.2 GV10x System Models................................................................................................................. 8
1.3. GV10x Controller Models ............................................................................................................ 9
1.4 GV10x Source Models ................................................................................................................. 9
2. Unpacking the GV10x ........................................................................................................... 11
2.1. Unpacking and Inspection ......................................................................................................... 11
2.2. Repacking for Shipping .............................................................................................................. 11
2.3. Recycling ................................................................................................................................... 11
3. Installing ................................................................................................................................ 12
3.1. Facilities Requirements ............................................................................................................. 12
3.2. Connect GV10x Source to Vacuum Chamber ............................................................................ 12
3.3. Connect GV10x Source to Controller......................................................................................... 13
3.4. Select Ashing Gas ...................................................................................................................... 13
4. Operating ............................................................................................................................... 14
4.1. How to Set Operating Parameters ............................................................................................ 14
4.2. How to Run the GV10x Downstream Asher .............................................................................. 19
4.3. How to Tune the GV10x Source ................................................................................................ 22
4.4. Changing the GV10x Asher Operating Pressure ........................................................................ 23
5. Shutting Down / Locking Out ............................................................................................... 25
5.1. Shutdown Procedure ................................................................................................................ 25
5.2. Lockout Procedure .................................................................................................................... 25
5.3. Release Procedure .................................................................................................................... 26
Appendices
Appendix A: Technical Specifications ..................................................................................... 27
A.1. GV10x Plasma Source (P3, P4, P5 models) ................................................................................ 27

ibss Group, Inc. GV10 Downstream Asher Series Specifications

General

Brand	ibss Group, Inc.
Model	GV10 Downstream Asher Series
Category	Controller
Language	English