ibss Group, Inc. GV10 Downstream Asher Series - Appendix A: Technical Specifications; A.1 GV10 x Plasma Source (P3, P4, P5 models); A.2 GV10 x RF Controller (BT and 2 U models)

Rev 2015-03-02 27
ibss Group
GV10x OPERATION AND SAFETY MANUAL
Appendix A: Technical Specifications
A.1. GV10x Plasma Source (P3, P4, P5 models)
Plasma Source
Patented IC Tube
Gas
Air or O
2
Operating Power Range
10 to 99 watts (limit of 70 watts is recommended)
Operating Pressure Range
2.0 Torr to <5 mTorr
Tuning
Capacitor Adjust
Gas Inlet
1/8“ compression w/ 0.5 µm filter (3 nm filter avail.)
Mounting
CF or KF40 (for P3, P4; KF25 or KF40 for P5
Dimensions & Weight
P3: 6.2 in.(H) x 3.1 in.(W) x 7.5 in.(L) – 5 lbs.
P4: 6.2 in.(H) x 3.1 in.(W) x 7.2 in.(L) – 3 lbs.
P5: 4.1 in.(H) x 3.1 in.(W) x 7.1 in.(L) – 2.5 lbs.
Shutoff Leakage Internal
1E-8 Torr l/s, 1.3E-9 Pa-m3/s
A.2. GV10x RF Controller (BT and 2U models)
Remote Control via Com Port
RS 232 I/O
Retentive Settings
Run Time, Watts, Min Watt, Max Watt, Ignite
Watt, Ignite Secs, RF at Power Up, Pressure
Trigger
Power Requirements
100-240VAC 50/60 Hz
Power Consumption
500VA
Impedance
50 ohms
Frequency
13.56 MHz at 100 watts max
Dimensions
BT: 6.75 in.(H) x 8 in.(W) x 17 in.(L) – 16 lbs.
2U: 3.47 in.(H) x 17 in.(W) x 14.59 in.(L) – 17 lbs.
AC Connector
IEC-10EEA 1 EMI