ibss Group, Inc. GV10 Downstream Asher Series - B.3 Inspection of System Equipment; B.4 Safety Interlocks

Rev 2015-03-02 29
ibss Group
GV10x OPERATION AND SAFETY MANUAL
B.3. Inspection of System Equipment (GV10x Source and Controller)
WHEN
DESCRIPTION
Daily, before
start
Not required.
Daily, end-of-day
Not required.
Periodic
If Source is left mounted to a vacuum chamber, observe that system base
pressure is reached. This will insure that the GV10x is not causing leaks.
B.4. Safety Interlocks
The GV10x Source employs an interlock that terminates/prevents RF power whenever the
Source control cable is NOT connected. The same applies to the RF coax cable.
Interlock Location:
The interlock as shown in Figure B-1 is located inside the
GV10x Source enclosure. The general location is marked
in the photo with a yellow arrow.
NOTE: Only a technician authorized by ibss Group
should ever remove the Source cover.
Hazards Protected:
RF exposure at cable and equipment contact points.
Detection Methods:
Will activate if either control cable or RF coax cable are
disconnected at either end.
Equipment Condition
After Interlock Activated:
Although electrical power is still going to the Controller,
the Source and Controller are in the “Plasma Off (STOP)”
state. This is a HARD STOP in that the user cannot
restart by pressing ON at the Controller or in the Remote
Control Software panels (the RF Generator is powered
OFF).
Figure B-1. Source Interlock