ibss Group, Inc. GV10 Downstream Asher Series User Manual

Rev 2015-03-02 9
ibss Group
GV10x OPERATION AND SAFETY MANUAL
1.3. GV10x Controller Models
MODEL
DESCRIPTION
DIFFERENCES
BT
Benchtop unit to control Source
operation; generates RF energy at
requested power level for given time
period and sends to Source.
Original model
Operable via built-in control panel or via
PC-based remote control software
communicating over RS-232 cable.
2U
Rack-mount unit with same basic
functionality as BT.
No control (text) panel; 2U is only
operable using PC-based remote control
software communicating over RS-232
cable. Software is provided or user can
write own. PC is not part of system.
1.4 GV10x Source Models
MODEL
DESCRIPTION
DIFFERENCES
P3
6.75” long x 5” high x 3” wide.
Using RF energy from Controller,
generates plasma for the
downstream ashing process.
Original model
Most efficient of the 3 Source models.
Running at maximum watt input, the P3
generates more plasma than P4 or P5 due
to its longer tube and more windings on
the induction coil.
P4
Same basic functionality as P3.
5.25” long x 5” high x 3” wide
Due to shorter tube and fewer windings on
the induction coil, when running at
maximum watt input, the P4 generates
about 25% less plasma than the P3.
P5
Same capabilities as P4 (essentially
a P4 repackaged.)
5.5” long x 4” high x 3” wide
Same differences from P3 as shown for
P4, PLUS: valves and filters moved inside
the enclosure; has smaller cooling fan and
physically smaller toroid than P4 (but
with similar electrical properties.)
Figure 1-1. BT Model
Figure 1-2. 2U Model

ibss Group, Inc. GV10 Downstream Asher Series Specifications

General

Brand	ibss Group, Inc.
Model	GV10 Downstream Asher Series
Category	Controller
Language	English