Rev 2015-03-02 28
GV10x OPERATION AND SAFETY MANUAL
Appendix B: Safety Considerations
B.1. Hazards Inherent in Equipment
RECOMMENDED SAFETY PROCEDURES
Contained within
Controller enclosure
Hazards are present only when equipment is energized and are not
exposed when covers remain in place.
Contained within RF
Source enclosure
Hazards are present only when equipment is energized and are not
exposed when covers remain in place.
B.2. Hazard Alerts: Location on Equipment and Meaning
Located on Source on a
side adjacent to the
plasma cooling holes
(these are NOT the fan
cooling holes.)
The Source plasma gives
off UV light, some
portion of which is
visible through the cooling holes. Avoid
looking directly into the cooling holes
and/or use protective eyewear designed to
filter UV.
Located on Controller rear
panel near the AC power
inlet.
The Controller is designed to
use 110-240VAC 50/60 Hz.
For personal safety, the cover
should never be removed
except by a technician
authorized by ibss Group.
Located on Source side
panel nearest RF IN
connector.
RF power is received
from the Controller via a
cable at the RF IN
connector. An interlock
is used to provide safe
operation. Unauthorized modifications to
the Source could be hazardous.
Located on Controller rear
panel, near the Source RF
Power connector.
An RF generator is contained
within the Controller and the
RF is sent to the Source via a
cable at this connector. An
interlock is used to provide
safe operation. Unauthorized modifications to
the Controller could be hazardous.
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