Rev 2015-03-02 19
GV10x OPERATION AND SAFETY MANUAL
4.2. How to Run the GV10x Downstream Asher
4.2.1. Steps for GV10x Downstream Asher Operation
4.2.1.1. After completing installation as described in Section 3 and any time the Source
is re-mounted onto the host chamber (see 3.2), pump down to insure that the host
chamber reaches usual operating pressure. This insures that there are no leaks from the
KF40 O-ring and the Source gas inlet. If the system does not pump down, refit the
source mounting.
4.2.1.2. Set Source RF power level to the desired RF power and cleaning time.
4.2.1.3. To ignite the plasma, press the ON/OFF button. A light will turn on above the
button. The GV10x will admit air through the filter
*
and gas isolation valve and apply
power to the Source. The host vacuum pressure will rise to a pressure controlled by the
Variable Constriction Valve; see Table 4-2, Variable Constriction Turns vs. Pressure. The
plasma should ignite after 30 to 60 seconds as the Source pressure stabilizes.
An alternative to pressing the ON/OFF button to manually start RF power is using a
preset pressure trigger to cause RF power to be turned on automatically based on pressure
level and pressure trigger value.
4.2.1.4. Using Pressure Trigger (Pres_Trg) to Automate RF Power ON
Automation via Pressure Trigger starts RF power on the GV10x when installed pressure
gauge (MKS Pirani or Pfeiffer) reports Pressure < a set value, Pres_Trg, and runs until
timeout (by HH MM SS setting on Operating Parameters Screen).
When Pressure Trigger is active (Pres_Trg not 00), the GV10x:
a. will start only once after descending below the set pressure
b. will not respond to the set pressure again until the chamber pressure has increased to
at least 100 (1E+2) Torr. This re-arms for the next Trigger when pressure is again low
enough.
When cleaning an electron or ion column chamber, check that the
electron gun isolation valve is closed and all detectors and active
components are shut down before turning on the GV10x.
Since the GV10x can be initiated at low vacuum, severe damage
to the system can occur if these precautions are not exercised.
*In the rare case that the 0.5 micron filter becomes clogged over time,
chamber pressure will not to rise to normal levels when the Source is
ignited. If this occurs, the filter element must be changed. See the
instructions included with spare filter element sent with your GV10x.
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