Rev 2015-03-02 20
GV10x OPERATION AND SAFETY MANUAL
After a Pressure Trigger has started the plasma, the GV10x can be stopped (and started
again if desired) from the GV10x-BT front panel or the GV10x-RC (“GUI”.)
Pressure Trigger values can be any integer value from 10 thru 60 (in increments of 1.)
The 2-digit trigger value equates to pressure readings in the 1E-5 to 1E-0 Torr range.
Selected trigger values (at increments of 10) and their resulting pressures follow:
00 Pressure Trigger is DISABLED
10 Ignition at 1E-5 Torr
20 Ignition at 1E-4 Torr
30 Ignition at 1E-3 Torr
40 Ignition at 1E-2 Torr
50 Ignition at 1E-1 Torr
60 Ignition at 1E-0 Torr
Pressure trigger (Pres_Trg) values can be set to ANY integer value from 10 to 60:
Setting Pres_Trg <10, results in Pres_Trg=00 (DISABLED)
Pres_Trg value >= 10 and <20, triggers in E-5 Torr Range (e.g. 19 ~= 9E-5, 11 ~= 2E-5)
Pres_Trg value >= 20 and <30, triggers in E-4 Torr Range (e.g. 28 ~= 8E-4, 22 ~= 3E-4)
Pres_Trg value >= 30 and <40, triggers in E-3 Torr Range (e.g. 37 ~= 7E-3, 33 ~= 4E-3)
Pres_Trg value >= 40 and <50, triggers in E-2 Torr Range (e.g. 46 ~= 6E-2, 44 ~= 5E-2)
Pres_Trg value >= 50 and <60, triggers in E-1 Torr Range (e.g. 59 ~= 9E-1, 51 ~= 2E-1)
Pres_Trg value = 60, triggers at 1E+0 Torr, (1 Torr)
4.2.1.5. If the Source does not ignite, press OFF & ON to cycle the RF power.
4.2.1.6. If the source still fails to ignite, the Source must be tuned. See 4.3: How to
Tune the GV10x Source.
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