NOTES ON ASHER OPERATION
Choosing the most effective run time and power level depends on the degree of chamber
contamination, chamber size and the origin of HC contamination. The optimum operating
parameters can only be determined after observing the results from different run times and power
level settings.
GV10x ashing HC efficiency depends on run time, operating pressure and RF power level, W.
Increasing run time exposes the chamber to more atomic O. Increasing watts creates more O
neutrals to be pumped through the chamber.
Cleaning uniformity depends on GV10x operating pressure. Lower operating pressure distributes
O neutrals more uniformly throughout the chamber; higher operating pressure produces greater
atomic O density in the local volume.
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