Rev 2015-03-02 15
GV10x OPERATION AND SAFETY MANUAL
4.1.2.2. After Self -Test screens are flashed, the first 4 lines of the Information and Setup
Screen (Figure 4-3a) will appear briefly and then the Operating Parameters Screen
(Figure 4-4) will be shown.
To review or modify Setup Parameters in Figures 4-3a, 4-3b, and 4-3c, press esc from the
Operating Parameters Screen. Scroll up/down thru the parameters by pressing ▼▲.
The first two lines display the GV10x Controller software version and text panel software
version. The third line shows Source and Controller serial numbers [SNs are also on
Source and Controller rear panels and noted in the GV10x Remote Control software].
Line 4 (Figure 4-3a) and lines 5 -10
(Figures 4-3b, 4-3c) are setup parameters:
Watt_Ign (Wmn-Wmx)
Secs_Ign. (0-9)
Watt_Max (49-99)
Watt_Min (5-20)
MKS/Pfeiffer (0/1)
Pres_Trg (0, 10-60)
PowerOnPlasma (0/1)
The setup parameters are selected by pressing ▼▲ and can be changed. Pressing enter
moves the blinking selector over selection to be changed, where ▼▲presses
increases/decreases the parameter, and pressing enter stores the final value. When
review/edits are complete, press esc to return to the Operating Parameters screen.
Factory setting for PowerOnPlasma is 0. If PowerOnPlasma is set to 0, RF power will
not be actuated when the Controller AC power is switched ON. If PowerOnPlasma is set
to 1, RF power will be actuated when the Controller AC power is switched ON.
Watt_Ign and Secs_Ign are factory set to 49 watts and three seconds, respectively.
This means 49 watts of RF Power is applied to the Source for 3 seconds to ignite the
plasma. The value of 49 watts is chosen to improve ignition at low pressure. Watt_Ign
can be adjusted down to Watt_Min or 10 watts, whichever is higher. Watt_Ign can be
Figure 4-3a. Information Screen, lines 1-4
Figure 4-3b. Information Screen, lines 5-8
Figure 4-3c. Information Screen, lines 7-10
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