Rev 2015-03-02 16
GV10x OPERATION AND SAFETY MANUAL
adjusted up to Watt_Max or 70, whichever is lower. When the GV10x is mounted onto a
Gentle Asher Chamber or if samples are to be cleaned in the SEM, ignition at elevated
power may not be desirable.
4.1.2.3. The Operating Parameters screen in Figure 4-4 will allow the operator to set
plasma power in watts, W, and run time in hours, HH, minutes, MM, and seconds, SS.
Values must be within the ranges given in the table of 4.1.1.
Source Power, watts (W), can be adjusted up/down even when RF ON. The settings for
time, HH MM SS, cannot be changed while RF ON.
While the Downstream Asher Process is running, the Act row shows actual power (W)
delivered to the Source in watts, reflected power (Wr), and elapsed time (HH MM SS).
The last row reports the tuning voltage (VDC), e.g. 0.0V in Figure 4-4, and Lost, the
elapsed time (HH MM SS) that the plasma is not ignited after the Downstream Asher
Process is started by pressing the front panel ON button. The tuning voltage can also be
monitored at the Black and Red terminals on the Source rear panel.
Parameters are chosen by moving the selection cursor, >. Press the Select button
repeatedly until the cursor is in front of the parameter to be changed. Note that there
is a one second delay between pressing the Select button and movement of the cursor.
When the cursor points to W, HH, MM, or SS you can set the respective value for
watts, run time hours, minutes or seconds by pressing Increase or Decrease.
Momentarily pressing the Increase or Decrease button will change the selected
parameter value by one count at a time; holding either button down for a full second
or more will make the value jump by an amount relative to the length of time the
button is held down (10 counts/second).
The Downstream Asher Process is manually started and stopped by pressing the
ON/OFF button on the Controller Front Panel.
Figure 4-4. Operating Parameters Screen
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