ibss Group, Inc. GV10 Downstream Asher Series - Page 24

Rev 2015-03-02 24
ibss Group
GV10x OPERATION AND SAFETY MANUAL
Table 4-2, Variable Constriction Turns vs. Pressure, shows operating pressure range
while adjusting the 15-turn Precision Needle Valve for TMP and Scroll pump.
Variable
Constriction
Turns Open
60 l/m Scroll
Pressure
Plasma
ON
71 l/s TMP
Pressure
Plasma
ON
0
67 mT
yes
2.8E-5 T
no
1
67 mT
yes
8.9E-5 T
no
2
67 mT
yes
3.6E-4 T
yes
3
67 mT
yes
6.9E-4 T
yes
4
83 mT
yes
2.2 mT
yes
5
130 mT
yes
5.8 mT
yes
5 1/2
170 mT
yes
9.0 mT
yes
6
210 mT
yes
12 mT
yes
6 1/2
260 mT
yes
14 mT
yes
7
310 mT
yes
18 mT
yes
7 1/2
370 mT
yes
24 mT
yes
8
450 mT
yes
31 mT
yes
8 1/2
520 mT
yes
40 mT
yes
9
590 mT
yes
52 mT
yes
9 1/2
660 mT
yes
70 mT
yes
10
720 mT
yes
10 1/2
810 mT
yes
11
890 mT
yes
11 1/2
960 mT
yes
12
1.1 T
yes
12 1/2
1.2 T
yes
13
1.3 T
yes
13 1/2
1.4 T
yes
14
1.5 T
yes
14 1/2
1.6 T
yes
15 max
1.8 T
yes
Figure 4-9. 1/8” S/S Metal Compression Fitting, Gas Inlet
Filter, Variable Constriction & Isolation Valve
Note:
When adjusting the
Needle valve, gently turn,
and never force into
either the fully closed or
fully opened positions.
As shipped, the Precision
Needle Valve is adjusted
to 5 to 7 turns open.
Table 4-2. Variable Constriction Turns vs. Pressure