Differences: remote vs. local state ........................................................... 2-50
Memory considerations ............................................................................ 2-52
Test Script Language (TSL) reference ..................................................... 2-53
Introduction ........................................................................................ 2-53
Reserved words ................................................................................. 2-53
Variables and types ........................................................................... 2-53
Operators ........................................................................................... 2-54
Functions ........................................................................................... 2-55
Tables/arrays ..................................................................................... 2-56
Precedence ........................................................................................ 2-57
Logical operators ............................................................................... 2-57
Concatenation .................................................................................... 2-58
Branching ........................................................................................... 2-59
Loop control ....................................................................................... 2-60
Standard libraries ............................................................................... 2-61
3 DUT Test Connections
Input/Output terminal blocks ...................................................................... 3-2
Input/Output LO and chassis ground ......................................................... 3-3
Sensing methods ....................................................................................... 3-5
2-wire local sensing ............................................................................. 3-5
4-wire remote sensing ......................................................................... 3-5
Sense mode selection ......................................................................... 3-6
Contact check connections ........................................................................ 3-7
Multiple SMU connections .......................................................................... 3-8
Guarding and shielding ............................................................................ 3-10
Guarding ............................................................................................ 3-10
Noise shield ....................................................................................... 3-10
Safety shield ...................................................................................... 3-11
Using shielding and guarding together .............................................. 3-13
Test fixture ................................................................................................ 3-15
Floating an SMU ...................................................................................... 3-16
Output-off states ....................................................................................... 3-18
Selecting the Output-off state ............................................................ 3-19
4 Basic Operation
Overview .................................................................................................... 4-2
Operation overview .................................................................................... 4-2
Source-measure capabilities ............................................................... 4-2
Compliance limit .................................................................................. 4-3
Setting the compliance limit ................................................................. 4-4
Basic circuit configurations .................................................................. 4-5
Operation considerations ........................................................................... 4-7
Warm-up .............................................................................................. 4-7