Contents
2
300554859_002_C0 - 11/2016 - © Leybold
0 Important Safety Information 5
0.1 Mechanical Hazards 5
0.2 Electrical Hazards 5
0.3 Hazards Caused by Materials and Substances 6
0.4 Danger of Damages to the Pump System 6
1 Description 10
1.1 Design 10
1.2 Standard Specification 11
1.3 Technical Data 13
1.3.1 Backing pumps 13
1.3.2 Pump systems 13
Product identification 13
1.4 Ordering Information 18
1.5 Accessories 21
2 Transport and Storing 24
3 Installation 25
3.1 Placement 25
3.2 Conforming Use 27
3.3 Ambient Conditions 27
3.4 Installing the Backing Pump 28
3.5 High Vacuum Connection 30
3.5.1 Removing the TURBOVAC Pump from the Pump System 32
3.6 Connecting the Exhaust Line 34
3.7 Connect the Cooling 34
3.7.1 Cooling Water 35
3.8 Connect a Power Failure Venting Valve or a Venting Valve 37
3.9 Connect Purge Gas 38
3.10 Connect a Flange Heater 40
3.11 Connect a Gauge 41
3.12 Connect a PC/Mobile Device 41
3.13 Electrical Connection 42
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