Maintenance
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300554859_002_C0 - 11/2016 - © Leybold
5 Maintenance
We recommend an exchange of the rotor unit after 80,000 operating hours at
the latest.
Such maintenance work can only be done by the Leybold Service. If required
contact the Leybold service center nearest to your location. You can find the
address on our internet page www.oerlikon.com.
At high pump loads - for example during cyclic opera tion, at high gas
through puts or at high ambient temperatures - the aforementioned mainte-
nance work should be carried forward. Please consult Leybold for recom-
mendations.
Depending on the degree of contamination of the purge gas used the filter
will clog and will have to be ex changed (our experience indicates that this will
become necessary after 1 to 6 months).
When an adsorption trap is used, regenerate or renew the adsorption agent
regularly; refer to the operating instructions provided with the trap.
As to maintenance work on the backing pump, please observe the informati-
on given in the corresponding Operating Instructions.
Before beginning with any kind of maintenance work switch the pump sys-
tem off and pull the mains plug.
5.1 Cleaning
Remove dust on the surfaces using a moist piece of cloth only to prevent the
creation of any sparks.
Cleaning the frequency converter internally
The frequency converter is basically maintenance free, since it does not con-
tain any adjustable components.
Depending on the installation and ambient conditions, the frequency convert-
er can suffer from the internal contamination (dust, humidity). Such contami-
nation can result in malfunctions, overheating or short circuits and therefore
needs to be avoided as far as possible. The Leybold Service can clean the
frequency converter. Here we are recommending clean ing intervals of approx-
imately 5 years.
Cleaning the TURBOVAC internally
Contamination inside the TURBOVAC is indicated by a deterioration in perfor-
mance, i. e. an increasing decline in working pressure.
If there is only slight contamination, such as a coating on the TURBOVAC
interior surfaces due to exposure to the atmosphere over an extended period
of time, the flange heater can be used for cleaning.
The ultimate pressure must be monitored while baking out under vacuum.
When making the inital examination of the pump, mount blank flanges to
eliminate any possibility of leaks and desorption in the vacuum chamber.
Rotor exchange
Purge gas filter
Adsorption trap
Backing pump
DANGER
Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com
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