Installation
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300554859_002_C0 - 11/2016 - © Leybold
Mount the TURBOVAC with the high vacuum flange firmly onto the vacuum
vessel. For this use a sufficient number of mounting bolts.
The contact surfaces of pump housing, vacuum system and centering ring
must be free of grease and dry so as to ensure adequate strength in case
the rotor should seize.
3.5.1 Removing the TURBOVAC Pump from the Pump System
The TURBOVAC can operate in any position. It can also be dismounted from
the pump system and only be fixed at the vacuum vessel. Please note in this
case the regulations relating to the firm attachment of the TURBOVAC as
detailed in the TURBOVAC Operating Instructions.
Disassembly: to remove the turbomolecular pump, loosen the six bolts at the
mounting panel (see fig. 3.7).
Fit in the mounting panel to the pump system to a tightening torque of 5 Nm.
5 m long wiring between the removed pump and the TURBOLAB pump sys-
tem is available. See Section Accessories.
NOTICE
Fastening torques for the high vacuum flange connection
Connection Pump Number Fastening torque
Clamps ISO-K TURBOVAC SL 80 (H) / 90 i / 250 i 4x M10 20 Nm
Claws for sealing surface in the base plate ISO-K TURBOVAC 350 i 8x M8 20 Nm
Claws for sealing surface in the base plate ISO-K TURBOVAC 450 i 8x M10 20 Nm
Bolts for collar flange ISO-K TURBOVAC SL 80 (H) / 90 i 4x M8 20 Nm
Bolts for collar flange ISO-K TURBOVAC 250 i / 350 i 8x M8 20 Nm
Bolts for collar flange ISO-K TURBOVAC 450 i 8x M10 35 Nm
Bolts for CF flange TURBOVAC SL 80 (H) / 90 i 8x M8 15 Nm
Bolts for CF flange TURBOVAC 250 i / 350 i 16x M8 15 Nm
Bolts for CF flange TURBOVAC 450 i 20x M8 15 Nm
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