Operation
60
300554859_002_C0 - 11/2016 - © Leybold
4.5 Shut-down
Stop the pump system with the TPU using the function keys on the display.
For oil-sealed backing pumps, vent the TURBOVAC before it comes to a
stop; see Section 4.6.
When using TRIVAC pumps the built-in anti-suckback valve will close auto-
matically, shutting off the forevacuum line. In backing pumps without a vacu-
um retention valve, close the valve in the forevacuum line.
When the system is not operating, ensure that neither ambient air nor clean-
ing media can enter the pump.
If a failure occurs the turbomolecular pump will be shut down automatically.
The red LED at the frequency converter lights up.
In the case of an emergency shut down, the pump is switched off as
described above. The rotor of the turbomolecular pump may be stopped
faster by venting the pump.
Under vacuum conditions the pump may take up to one hour to run down,
when venting to atmospheric pressure it may take up to one minute. During
the time the pump is running down, the green LED will flash, indicating that
the rotor has not yet arrived at standstill.
When shutting down by switching off the power supply voltage, the
pump turns without an LED lighting up on the display. When switching off
and after the LEDs go out, wait for roughly another 15 minutes at the turbo
pump until the pump has come to a standstill.
Unplug any connectors only when the mains voltage is switched off and
the pump does no longer turn (the green LED is off).
Venting
Emergency shut down
CAUTION
4.4.5 Monitoring of the Operation Conditions
LED Symbol LED Status Display Meaning
Red
Off No System Error
Flashing System Warning
Steady System Error
Steady Turbo Pump lost communication
Green
Off Pump not turning /
no start command active
Flashing
50 ms on, 500 ms off
Start delay > 0 (P36)
Flashing slowly 1/s Running up
Flashing fast 3/s Running down
Steady Normal Operation
White Steady Ethernet Communication Active
Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com
To Next Page
Loading...
Need help?
General
