Operation
62
300554859_002_C0 - 11/2016 - © Leybold
Fig. 4.3 Maximum rise in pressure
10
3
mbar
10
2
10
1
Forevacuum pressure
0 5 10 15 20 25 30
s
Time
4.7 Bakeout
Only turbomolecular pumps with CF flanges may be baked out.
The backing pump and TURBOVAC must be in operation during bakeout.
Switch the flange heater on and off at the switch S208 at the TURBOLAB.
Protect the rotor against intensive, direct heat radiation. The temperature of
the high vacuum flange must not exceed 100 °C. When baking out at the
forevacuum side – at a sorption trap, for example – ensure that the compo-
nents attached direct are not heated to more than 100°C.
When baking out the pump, operate it with the water-cooling system on.
Following bakeout, retighten the clamp screws on the flange heater, if
required.
Leave the flange heater on the TURBOVAC.
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