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MKS 356 Micro-Ion Plus Series User Manual

MKS 356 Micro-Ion Plus Series
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Chapter 3
28 Micro-Ion
®
Module Instruction Manual - 356007-GP
Ion Gauge/Conductron
Gauge Auto On/Off
As the vacuum system pumps down from atmosphere, the Conductron
sensor (heat loss sensor) measures pressure until a sufficiently low pressure
level is achieved, then automatically turns ON the Micro-Ion gauge in the
low emission mode. During the first decade that both sensors are operating,
the control electronics mixes the signals. As the pressure is further reduced,
the Micro Ion gauge switches from low emission to high emission. As
pressure increases, the opposite occurs at slightly higher pressures. This
sequence is illustrated in Figure 3-2.
Figure 3-2 Auto Ranging Actuation Points
Other emission and filament operational modes are available to meet
specific application requirements. Contact a Customer Service Engineer for
help with your particular application. Contact information is provided on
page 3 and on the back cover of this instruction manual, and Customer
Service on page 59.

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MKS 356 Micro-Ion Plus Series Specifications

General IconGeneral
BrandMKS
Model356 Micro-Ion Plus Series
CategoryControl Unit
LanguageEnglish

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