MKS 356 Micro-Ion Plus Series User Manual

Series 356 Micro-Ion
®
Plus Vacuum Gauge Module
Catalog numbers for Series 356 Micro-Ion Plus Vacuum Gauge Modules
Power supply and cable are not included.
Module with RS-485 interface, analog output, no display: 356001 - Y # - #
Module with RS-485 interface, analog output, digital display: 356002 - Y # - #
Ion Gauge Filaments:
Yttria-coated iridium Y
Flange/Fitting:
NW16KF D
NW25KF E
NW40KF K
1.33 inch (NW16CF) ConFlat-type F
2.75 inch (NW35CF) ConFlat-type G
1/2 inch VCR-type male H
NW16L M
40KFL L
Measurement Units:
Torr T
mbar M
pascal P
VCR and VCO are registered trademarks of Swagelock Company.

MKS 356 Micro-Ion Plus Series Specifications

General

Brand	MKS
Model	356 Micro-Ion Plus Series
Category	Control Unit
Language	English