Maintenance Manual Test Programs
Test No./
Function Outline
：
Z-axis (vertical) movement <Z axis movement check>
If the loader has not been initialized, initialization starts.
① FOUP Door open. ② Press the interlock switch and the [Start] button.
③ FOUP Door lower limit position. ④FOUP Door upper limit position.
The loader then repeats steps ③ to ④.
・ Keep the interlock switch pressed while operating ③ and ④.
・ Do not install the cassette.
・ Press the [Start] button to pause the operation at the break point, and press it again to continue the
operation.
・ When an error occurs, the loader displays the same error code as in the regular operation, and then
stops.
・ If you press the [Quit] button while pressing the interlock switch, the loader returns to its initial
position and stops the operation.
No. 2
A-arm
vertical
movement
check
<A-arm vertical movement check>
This program can be used to check the A-arm vertical movement.
Press the [Start] button.
Select the item to adjust using the menu buttons on the liquid crystal panel.
[M1]：A-arm insertion height <A-arm insertion height>
[M2]：Wafer removal height <Wafer insertion height>
Do not continue the operation for longer than 5 minutes.
Wait for longer than one minute before restarting the operation.
[M1]：A-arm insertion height <A-arm insertion height>
Select the operation speed using the menu buttons on the liquid crystal panel.
[M1]: High speed <Fast speed> [M2]: Medium speed <Middle speed> [M3]: Low speed <Slow
speed>
• If you do not specify anything here, the loader will operate at the high speed [M1]: High speed
<Fast speed> setting.
Press the [Start] button, and the loader starts the operation.
If the loader has not been initialized, initialization starts.
①Height corresponding to 1 to 25 wafers ②Upper limit ③Lower limit
The loader then repeats steps ① to ③.
• Press the [Start] button to pause the operation at the break point.
• The speed can be changed during the pause.
• When an error occurs, the loader displays the same error code as in the regular operation, and then
stops.
• Press the [Quit] button, and the A-arm returns to its initial position and the loader stops the operation.
[M2]：Wafer removal height <Wafer insertion height>
Select the operation speed using the menu buttons on the liquid crystal panel.
[M1]: High speed <Fast speed> [M2]: Medium speed <Middle speed> [M3]: Low speed <Slow
speed>
• If you do not specify anything here, the loader will operate at the high speed [M1]: High speed
<Fast speed> setting.
Press the [Start] button, and the loader starts the operation.
If the loader has not been initialized, initialization starts.
①Height corresponding to 1 to 25 wafers ②Upper limit ③Lower limit
The loader then repeats steps
①
③
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