12. File Configuration
PV6253-F4E016 53
Reference file name
Sampling time
Film thickness measurement-ready flag
Measurement type
Unit type
Dispersion equation type
Fixed value
Schott's parameter A0 for film thickness
Schott's parameter A1 for film thickness
Schott's parameter A2 for film thickness
Schott's parameter A3 for film thickness
Schott's parameter A4 for film thickness
Schott's parameter A5 for film thickness
Sellmeier's parameter A1 for film thickness
Sellmeier's parameter A2 for film thickness
Sellmeier's parameter A3 for film thickness
Sellmeier's parameter B1 for film thickness
Sellmeier's parameter B2 for film thickness
Sellmeier's parameter B3 for film thickness
File name for film thickness
Refractive index data file name
[end]
12.4. Spectral reflectance data file (*.csv)
This file stores the spectral reflectance data measured with USPM. USPM-RU is capable of
indicating up to 10 points of measured data simultaneously, and saving those data to the same
file. When loading the file, the software reproduces the indications as at the time of saving.
The data file is saved in the CSV format or DAT format.