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Pfeiffer Vacuum OMNISTAR - Page 83

Pfeiffer Vacuum OMNISTAR
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Maintenance
83
7 Detach the capillary from the gas inlet valve using a 1/4 in open-end wrench.
8 Use the M2.5 hex key to remove the (2) fixing screws from the gas inlet flange. The
two fixing screws are shown in Figure 10-23.
9 Lift the gas inlet out of the GSD 320.
Figure 10-23 Removing the two fixing screws
10 With open-end wrench size 13 unfasten the nut and remove the spring washers.
11 Pull the magnet off the guiding tube.
12 Using a hexagon socket wrench size 2.5 remove the (2) screws from the
retaining plate 2.
NOTE
Step 15 through Step 23 apply to both valves.
Fixing screws

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