40
BG 5195 BEN / A (2011-05) TPG261.oi
Ö The value is increased/
decreased by the defined in-
crements.
The calibration factor allows the measured value to be
calibrated for other gases than N
2
(→ characteristic
curves in [1] … [13]).
Available for:
; Pirani Gauge
(TPR)
; Pirani Capacitance Gauge (PCR)
; Cold Cathode Gauge
(IKR)
; FullRange™ CC Gauge
(PKR)
; Process Ion Gauge
*)
(IMR)
; FullRange™ BA Gauge
**)
(PBR)
; Capacitance Gauge
(CMR)
; Piezo Gauge
(APR)
*)
only for pressures <1×10
-2
mbar.
**)
only for pressures <1×10
-1
mbar.
Value
e.g.:
Ö No correction
e.g.:
Ö Measurement value
corrected by a factor
of 0.10 … 9.99
(logarithmic gauges).
Measurement value
corrected by a factor
of 0.500 … 2.000
(linear gauges).
Calibration factor