R301 RF POWER SUPPLY OPERATOR’S MANUAL
Level Parameter Detail
7 Exciter Mode (Frequency Source) Select:
EXCITER- MASTER: The unit uses its internal frequency source to generate the RF output
signal. In “master” mode, the internal frequency source is available at the CEX OUT connector
on the rear panel. (Factory Default Setting)
EXCITER- SLAVE: The unit uses the rear panel CEX IN signal as the frequency source for the
RF output signal. “Slave” Mode is used in systems with multiple RF power supplies; with one
RF power supply as the master and the other power supplies operating as “slaves”. This
configuration is used to keep the power supplies synchronized, thus preventing or minimizing RF
circulating currents within the processing system. In “slave” mode, the CEX IN signal is routed
to the rear panel CEX OUT connector.
8 Maximum Output Power:
Allows the user limit the maximum RF output power. Limit is adjustable between 1 and 300
Watts, in 1-Watt increments. When the output power setpoint is equal to the MAX POWER
value, “MAX” is indicated on the front panel display, line 2, right-hand side.
Factory default value is 300 Watts.
9 Voltage Feedback Probe Attenuation Factor:
Used when regulating the unit’s RF output with an external feedback signal. Setting the
attenuation factor to match the external system’s probe attenuation factor allows the R301 RF
power supply to directly display the feedback signal in Volts.
External feedback voltages are derived from the processing system and can range from tens of
Volts to thousands of Volts. Because it is not practical or safe to use high-voltage control
signals, and the R301’s maximum external feedback input voltage is 10VDC, an attenuator probe
is used in most systems.
The external system’s attenuator probe is calibrated, and the calibration is specified as a ratio.
Adjust the R301’s voltage feedback probe attenuation factor to match the system’s voltage probe
attenuation ratio.
Related menu levels: 3, 4
Factory Default value is 200:1
10 Reflected Power Alarm:
Allows the user to set a threshold for indicating a high-reflected power condition. Adjustable
between 1 and 300 Watts, in 1-Watt increments.
When the alarm threshold is met or exceeded, “REF” is indicated on line 2 of the front panel
display and the status of the analog interface connector RFENABLED* signal (pin 8) is changed
from a TTL logic low (0) state to a TTL logic high (1) state.
Units built on or after August 1, 2004 are shipped with the alarm threshold set to 150 Watts
(disabled). Units built prior to August 1, 2004 were shipped with the alarm threshold set to 35
Watts.
To enable changing of the RFENABLED* signal status, set the alarm threshold lower than the
unit’s maximum reflected power limit (50 Watts)
Factory default value is 150 Watts (disabled).
11 Power Control Gain
Factory default setting is 100%
Page 31
Seren IPS Inc.
6100130000 Rev. 0.05
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