2 Installation Conditions
LCMS-8045/8050 Pre-Installation Requirements
6
2.6 System Size (Dimensions and Weight)
Rotary pump (with Oil mist filter)
2.7 System Installation Example
z When using a nitrogen gas generator, prepare the space for it additionally.
(For details, please refer to the installation guide came with the generator.)
z When using an Ar gas cylinder, prepare the space for it additionally.
(Example: Ar cylinder (47L) ā 30 (W) x 30 (D) x 150 (H))
Evacuation hose (length: 1.2 m from the back of the MS unit)
E2M28
(With oil mist filter)