Appendix
A.3 Directives and standards
Power Module PM240-2
138 Hardware Installation Manual, 01/2017, A5E33294624B AE
Specification for semiconductor process equipment voltage drop immunity
The inverters comply with the requirements of standard SEMI F47-0706.
Siemens AG employs a quality management system that meets the requirements of ISO
9001 and ISO 14001.
Certificates for download
● EC Declaration of Conformity:
(https://support.industry.siemens.com/cs/ww/en/view/58275445)
● Certificates for the relevant directives, prototype test certificates, manufacturers
declarations and test certificates for functions relating to functional safety ("Safety
Integrated"):
(http://support.automation.siemens.com/WW/view/en/22339653/134200)
● UL certificates:
(http://database.ul.com/cgi-bin/XYV/template/LISEXT/1FRAME/index.html)
– FSA, FSB, FSC: 200 V UL File E121068, Vol. 2 Sec. 29
– FSA, FSB, FSC: 400 V UL File E121068, Vol. 2 Sec. 27
– FSD, FSE, FSF: 200 V / 400 V / 690 V UL File E192450, Vol. 13 Sec. 4
Standards that are not relevant
China Compulsory Certification
The inverters do not fall in the area of validity of the China Compulsory Certification (CCC).
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