Cirrus SP101013.111 – 10 October 2012
MKS Instruments UK Ltd., Spectra Products
7.5 Fitting the Tool Guide
Fit the Tool Guide to the inlet flange using the three screws supplied.
7.6 Removing the Orifice Disk
Insert the Removal Tool into the guide and push the tool into the orifice disk. Press firmly until the tool
bottoms against the guide.
Remove the tool and Tool Guide and remove the Orifice Disk from the flange.
DO NOT RE-USE THE ORIFICE DISK
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