Spectra MKS Cirrus LM99 - Source Assembly (PVD Ion-source)

Cirrus SP101013.111 – 10 October 2012
MKS Instruments UK Ltd., Spectra Products
59
9.7 Source Assembly (PVD ion-source)
Item
Description (Dimensions in mm)
Part Number
1
Ceramic Washer 1.0L
400010202
2
Screw M1.6x8
200901608
-
Plain Washer for above screw
270316000
3
Ceramic Tube 5.1L
400020051
4
Repeller Plate Assembly
LM504-063PL
5
Source Plate Assembly
LM504-066PL
6
Ceramic Washer 0.5L
400010207
7
Ceramic Restrictor
400010206
8
Extract Plate Assembly
LM504-064PL
9
Mounting Ring
305040233
1
2
3
4
1
5
6
4
7
8
1
9