Spectra MKS Cirrus LM99 - Filament Plate (PVD Ion-source)

Cirrus SP101013.111 – 10 October 2012
MKS Instruments UK Ltd., Spectra Products
58
9.6 Filament Plate (PVD ion-source)
Item
Description (Dimensions in mm)
Part Number
1
Screw M1.6x3
200901603
2
Barrel Connector
305040434
3
Screw M2x4
200902004
4
Filament Plate Tungsten Fils
842-060
4
Filament Plate Thoria Fils
842-002
1
2
3
3
4
5