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Spectra MKS Cirrus LM99 - User Manual

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Cirrus (LM99)
User Manual
SP101013.111
October 2012

Table of Contents

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Spectra MKS Cirrus LM99 Specifications

General IconGeneral
BrandSpectra
ModelMKS Cirrus LM99
CategoryMeasuring Instruments
LanguageEnglish

Summary

EC Declaration of Conformity

Installation and Operation Guidelines

Installation Procedures

Procedures for installing the instrument according to European regulations.

Operation Guidelines

Guidelines for safe and correct operation of the instrument.

Maintenance Guidelines

Instructions and warnings related to instrument maintenance.

Specifications

Mechanical Specifications

Physical dimensions and weight of the Cirrus instrument.

Electrical Specifications

Electrical power requirements and specifications for the instrument.

Safety Standards

Safety warnings and standards related to the instrument.

Connectors

Details of external connectors for circuits and accessories.

Introduction

Unpacking

Connections and Indicators

Front Panel Overview

Description of the front panel layout and status indicators.

Rear Panel Connections

Details the external connections and ports on the rear of the instrument.

Installation

Default IP Address

Specifies the default network IP address configuration for the instrument.

Changing IP Address

Instructions for modifying the instrument's IP address for network connectivity.

Resetting IP Address

Procedure to restore the instrument's IP address to default settings.

Operation

Connecting the Instrument

Steps for connecting the instrument to a host PC for operation.

Powering Up the Instrument

Sequence for powering on the instrument and initial status checks.

Starting the Quadrupole

Procedure for starting the quadrupole analyzer component for operation.

Baking the System

Instructions for baking the system to reduce background peaks.

Shutting Down the Instrument

Step-by-step procedure for safely shutting down the instrument.

Maintenance

Removing the Cover

Instructions for safely removing the instrument's outer cover for access.

Internal Components Overview

Overview and identification of internal instrument components.

Replacing the Orifice Disk

Procedure for replacing the orifice disk, including tools and steps.

Changing Filaments

Detailed guide on how to change the instrument's filaments.

Ion Source Cleaning

Method for cleaning the ion source without removing it from the analyser.

Cleaning or Replacing Ion Source

Procedures for cleaning or replacing the entire ion source assembly.

Analyser Maintenance

Analyser Overview

Introduction to the quadrupole analyser and its main functional areas.

Removing the Analyser

Procedure for safely removing the analyser from the vacuum system.

Refitting the Analyser

Steps for correctly re-installing the analyser into the vacuum chamber.

Ohmmeter Analyser Checks

Using an ohmmeter for basic analyser diagnostics and continuity checks.

Checking Filaments

Procedure for checking the status and integrity of the instrument's filaments.

Exploded Views

Analyser Flange Pin-outs

Diagram and description of analyser flange electrical connections.

Exploded View of Analyser (Open Ion-source)

Exploded diagram of the analyser assembly with open ion-source.

Filament Plate (Open Ion-source)

Exploded diagram of the filament plate for open ion-source configuration.

Source Assembly (Open Ion-source)

Exploded diagram of the source assembly for open ion-source configuration.

Filament Plate (PVD Ion-source)

Exploded diagram of the filament plate for PVD ion-source configuration.

Source Assembly (PVD Ion-source)

Exploded diagram of the source assembly for PVD ion-source configuration.

Source Alignment Jig (Common)

Details and illustration of the source alignment jig used in maintenance.

Communications Troubleshooting

Check Host Computer IP Address

Steps to verify the IP address configuration of the host PC for connectivity.

Assign Static IP Address

Guide to assigning a static IP address to the host computer for troubleshooting.

Resetting Default IP Address

Procedure to restore the instrument's IP address to its factory default.

Optional Hardware

Multi-stream Inlet

Information and setup for the multi-stream inlet option.

UDV System Setup

Details on the UDV system, its components, and setup procedures.

Check Baratron Zero

Procedure for calibrating the Baratron gauge by checking its zero point.

Setting the UDV Basics

Basic steps for setting up and configuring the UDV system.

Baking the UDV

Instructions for baking the UDV valve for optimal performance.

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