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MKS Cirrus LM99
Spectra MKS Cirrus LM99 User Manual
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Cirrus
(LM99)
User Manual
SP
1010
13.
111
Oc
to
be
r
201
2
2
Table of Contents
Default Chapter
6
Table of Contents
6
1 Specification
9
Mechanical
9
Electrical
9
Fuses
9
Environmental
9
Safety
9
Connectors
10
Warning Labels
11
Ventilation
12
2 Introduction
13
3 Unpacking
14
4 Connections and Indicators
15
The Front Panel
15
Power
16
Turbo at Speed
16
Capillary Heater
16
System Heater
16
Emission
16
Comms
16
Capillary Inlet
16
The Rear Panel
17
RGA Comms
18
Power
18
Analog I/O
18
Digital I/O
19
Exhaust Purge IN/OUT
20
5 Installation
21
Default IP Address
21
Changing the IP Address
21
Re-Setting the IP Address
22
6 Operation
23
Connections
23
Powering up
23
Starting the Quad
25
Baking
25
Temperature Settings
26
Capillary Heater
26
Shutting down
27
7 Maintenance
28
Note: These Are Not Operator Functions, Only Competent Persons May Carry out These Operations
28
Removing the Cover
28
Internal Components
29
Turbo Molecular Pump
30
Diaphragm Pump
30
RGA Electronics (Microvision IP)
30
Capillary Inlet
30
Replacing the Orifice Disk
32
Orifice Disk Tools
35
Tool Guide
35
Removal Tool
35
Insertion Tool
35
Fitting the Tool Guide
36
Removing the Orifice Disk
36
Fitting a New Orifice Disk
37
Re-Assembling the Inlet Flange
39
8 Analyser Maintenance (PVD and Open Source)
41
Overview
41
Removing the Analyser
42
Refitting the Analyser
44
Ohmmeter Analyser Checks
45
Checking Filaments
46
Changing Filaments
47
Removing the Filaments
47
Fitting New Filaments
48
Ion Source Cleaning
49
Cleaning or Replacing the Ion Source
50
Removing the Ion Source
51
Dismantling the Source Assembly
51
Source Re-Assembly
52
9 Exploded Views
53
Analyser Flange Pin-Outs
53
Exploded View of the Analyser (Open Ion-Source Shown)
54
Filament Plate (Open Ion-Source)
55
Source Assembly (Open Ion-Source)
56
Extract Plate (Open Ion-Source)
57
Filament Plate (PVD Ion-Source)
58
Source Assembly (PVD Ion-Source)
59
Source Alignment Jig (Common)
60
11 Communications Troubleshooting
61
12 Returning Your Unit for Service
68
Support Contact Numbers
68
13 Optional Hardware
71
Multi-Stream Inlet
71
Connecting the Sample Lines
71
Software Operation
72
Udv
73
Location of Key Components
73
Before You Begin
74
Connections
74
Check Baratron Zero
75
Setting the UDV - Basics
76
Baking the UDV
78
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Spectra MKS Cirrus LM99 Specifications
General
Brand
Spectra
Model
MKS Cirrus LM99
Category
Measuring Instruments
Language
English
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