Cirrus SP101013.111 – 10 October 2012
MKS Instruments UK Ltd., Spectra Products
8.3 Refitting the Analyser
1. Note the gas inlet tube on the top of the analyser (if it is fitted with a PVD) source. Look into the
vacuum chamber and note the ceramic socket which the gas inlet tube must mate with when you re-fit
the analyser.
2. Clean, using a suitable solvent, and dry the new copper gasket then slip it over the analyser in place
of the old one.
3. Carefully, insert the analyser into the vacuum chamber trying not to let the leads touch the wall of
the vacuum chamber. Make sure the gasket does not slip out of its slot as you push the flanges
together. Make sure that the gas inlet tube on the top of the analyser mates with the ceramic socket.
4. Rotate the analyser flange so that it is in the correct orientation.
5. Bolt the flanges together remembering to tighten opposite bolts equally.
6. Carefully re-fit the Electronics Package, not forgetting to re-tighten the locking ring.
7. Perform a leak check of the system
To Next Page
Loading...
