Cirrus SP101013.111 – 10 October 2012
MKS Instruments UK Ltd., Spectra Products
C) MAINTENANCE
WARNING-DANGEROUS VOLTAGES EXIST INSIDE THE EQUIPMENT
1. Maintenance functions must only be carried out by competent persons.
2. During the warranty period, faulty equipment must be returned to MKS Instruments, Spectra
Products Ltd., unless special arrangements are made.
3. There are no user serviceable parts in the electronic equipment. Certain components are EMC and
safety critical and must not be substituted. Replacement parts are available from MKS Instruments,
Spectra Products Ltd.
4. Equipment enclosures embody certain special fastenings and bonding devices that affect EMC and
safety performance. These must be correctly re-fitted after servicing.
5. It is important that a yearly service schedule be maintained on both the diaphragm and turbo
molecular pumps. This period should be reduced for corrosive applications.
The pump components such as the diaphragms and lubricant reservoirs can contain
toxic substances from the media pumped.
Dispose of in accordance with local regulations.
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