Ulvac LR Series - Specification; Design concept; Performance and Configuration

1
1. Specification
Design concept
This LR/HR series models are designed to perform vacuum pumping for electronic
devices (such as semiconductor and LCD) manufacturing equipment.
Consequently, the interlocking system and control system of this LR/HR series are
assumed to be built-in to the host equipment.
LR/HR series can be used generally in the following processes:
- Chamber vacuum pumping in spattering or vapor deposit processes in which only
inert gases (nitrogen or argon) are used.
- Vacuum pumping for chambers where devices are set or taking out (air pumping).
- Other general vacuum pumping (low hazardous level gases: gases no toxicity, no
inflammable, no corrosive and no explosive).
Performance and Configuration
LR/HR series have a performance of vacuum pumping in pressure regions from
atmospheric pressure through medium vacuum pressure (about 5Pa). And LR/HR
series have nine variations of speed to support various equipment.
LR/HR60, LR/HR90 and LR/HR180 are composed of the primary dry vacuum pump
unit.
LR/HR300, LR/HR600, LR/HR1200 and LR/HR1800 are a composition in which
the booster pump is added to the upside of LR/HR60, LR/HR90, and LR/HR180.
As for this manual, important information to use these products safely has been
described.
Please read before it uses it.
LR/HR300
、
600
、
1200
、
1800
LR/HR60
、
90
、
180