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4. Inspection And Maintenance
4.1 Inspection
- Periodically check (it is recommended to check once a day) the controller or the remote
operation output to see if any alarming signal is output.
Also check the log data to see if any alarming data is reported.
If alarming signal is displayed, take steps according to the TROBLE SHOOTING.
- When the pump is contaminated, wipe out it with a dry rag.
4.2 Maintenance
- These LR/HR products are maintenance free except when to connect with the host equipment,
or disconnect from it, and to regulate N2 gas flow at the time of operation. Overhaul or repair
work is performed at ULVAC. When any trouble occurs, please contact with your local ULVAC
service center (please refer to the ULVAC address list at the end of this manual).
< Maintenance period >
It is recommended to overhaul the pump once a year.
The bearing on the vacuum side uses grease for lubrication. Replace the bearing once a year,
as rule, though the frequency changes with use and application of the pump. It is important to
maintain the performance (safety is included) and keep the programmed production. (However,
the exchange period is different depending on use conditions)
When overhauling it, parts for which the exchange is necessary.
Part name Model name Part name Model name
Bearing All models Power lock All models
O-ring All models Coupling spider All models
Teflon seal All models Bearing of motor All models
Axis receiving turn stop All models Vacuum pump oil All models
Labyrinth ring All models
Parts for which exchange is necessary every two years.
Part name Model name Part name Model name
Pressure sensor HR series Bearing case All models
Parts for which exchange is necessary every three years.
Part name Model name Part name Model name
Solid-state relay HR series Pressure diameter for purge gas
All models
Cooling fan All models Inverter LR/HR300, 600,1200,1800
Ball All models Seal sleeve All models
Compression spring All models
Parts for which exchange is necessary every five years.
Part name Model name Part name Model name
Breaker HR series Switching power supply All models
Magnetic contact All models Controller All models
Cooling water sensor All models Exhaust piping heater HR series
Flow sensor for purge gas All models Mantle heater HR300, 600,1200,1800
Current sensor All models Cylinder
1)
All models
Solenoid-controlled valve All models Rotor shaft
1)
All models
Thermo-couple All models Rubber vibration isolator All models
Control base All models
1)When the size is measured, and the warp is confirmed, they are the exchanges. When
overhaul is required, please contact with your local ULVAC service center. All overhaul will
be performed at the ULVAC.
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