Ulvac LR Series - In Case of Alarm Signal

76
4.3.2 In Case of Alarm Signal
Display Symptom Cause Corrective action
N
2
PURGE
GAS LOW
ALARM
Purge gas flow
rate low
Flow rate regulating valve
is closed.
Open the flow rate-
regulating valve.
Insufficient difference
pressure at inlet/outlet
ports
Increase supply pressure
from host equipment.
Insufficient supply of gas Increase supply of gas.
Clogged piping If the trouble is in the
pump, contact with service
center. Repair by ULVAC
Leak in joint
Failure of instrument Contact with service center,
repair by ULVAC,
WATER
FLOW LOW
ALARM
Cooling water
flow rate low
Flow rate regulating valve
is closed.
Open the flow rate-
regulating valve.
Insufficient difference
pressure at inlet/outlet
ports
Increase supply pressure
from host equipment.
Insufficient supply of gas Increase supply of gas from
host equipment.
Clogged piping If the trouble is in the
pump, contact with service
center. Repair by ULVAC
Leak in joint
Failure of instrument Contact with service center.
Repair by ULVAC
DRP/MBP
PUMP
TEMP
HIGH
ALARM
Abnormal
increase of pump
temperature
Environment temperature
is high.
Lower the environment
temperature.
Insufficient cooling water Open the flow rate-
regulating valve.
Failure of instrument Contact with service center.
Repair by ULVAC
Increase of backing
pressure
Clean and wash the
exhaust pipe.
The inlet pressure is high.
(only booster pump units
of HR series.)
Usual pressure is operating
the range that is from the
ultimate pressure to 200Pa.
Exhaust
TEMP
HIGH
ALARM
Abnormal
increase of
exhaust pipe
temperature
Environment temperature
is high.
Lower the environment
temperature.
Exhaust pressure is high.
(>0.13Mpa)
Clean and wash the
exhaust pipe.
(Reverse-valve)
DRP/MBP
PUMP,
Exhaust,
Option
TEMP
E ALARM
Failure of
temperature
sensor
Disconnection of the
sensor wiring, contact of
the connector,
PC board
portion bad connection.
Contact with service center.
Repair by ULVAC