Ulvac LR Series - Specifications for utilities

9
1.2 Specifications for utilities
Specification
Spec Model LR/HR60 LR/HR90 LR/HR180
Maximum pumping speed
m3/hr (L/min)
50Hz
62(1030) 112(1860) 183（3100）
60Hz
80(1333) 126(2100) 237(3950)
Maximum inlet pressure (Pa) Atmospheric pressure
Ultimate pressure (Pa) 5.0
2)
Maximum exhaust pressure Atmospheric pressure
Inlet diameter
Standard VG50 VG80 VG80
CE NW40 NW50 NW50
Outlet diameter NW40
Lubricating oil
BARRIERTA J100F, J100FE
0.5L 0.9L 1.5L
Grease
BARIERTA JFE552HV
23.8g 30.0g 37.4g
Weight (kg) 180kg 245kg 335kg
1) Maximum inlet pressure of HR300, HR600, HR1200, and HR1800 is 200Pa. Other models
are atmospheric pressure.
2) The ultimate pressure is a value when the seal gas is 5SLM and the gas ballast gas is
0SLM.
Spec Model LR/HR300 LR/HR600 LR/HR1200 LR/HR1800
Booster Pump PRC-003A PRC-006A PRC-012A PRC-018A
Primary Pump LR/HR60 LR/HR90 LR/HR90 LR/HR180
Maximum pumping speed
m3/hr (L/min)
50Hz
359(5980) 653(10900) 1012(16900) 1701(28350)
60Hz
365(6080) 701(11700) 1051(17500) 1784(29700)
Maximum inlet pressure (Pa) Atmospheric pressure or 200Pa
1)
Ultimate pressure (Pa) 0.67
2)
Maximum exhaust pressure Atmospheric pressure
Inlet diameter
Standard VG80 VG80 VG100 VG150
CE NW80 NW80 NW100 NW100
Outlet diameter NW40
Lubricating oil
Grease
PRC
BARRIERTA J60F
0.7L 1.5L 1.9L 1.9L
HR
BARIERTA J100F, J100FE
0.5L 0.9L 0.9L 1.5L
BARIERTA JFE552HV
23.8g 30.0g 30.0g 37.4g
Weight (kg) 275kg 370kg 420kg 545kg