38
2.3.2 Nitrogen Gas Piping
: Before start work, ensure that all hazardous energies are shut
off. Refer to 2.1 For Safety Use.
: Use the supplied nuts and ferrule for piping work.
■- Connection Requirements : Swage-lock for 6.35mm-diameter pipe
■ - Proper Piping : Use SUS pipe of outside diameter of 6.35mm-diameter with
more than 0.9mPa pressure proof joints.
Nitrogen
gas
Supply gas pressure
(MPa: reading on gauge)
0.1 to 0.5
Regulated pressure
(MPa: reading on gauge)
0.05
(Regulated pressure in pump)
Flow rate
Shaft seal (SLM) 0 to 5
Gas ballast (SLM) 0 to 45
WARNING
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