Ulvac LR Series - Wiring for Remote Control

41
2.4.2 Wiring for remote control
Pin assignment
Pin
No.
I/O Item Specifications
1
IN
External interlock
CLOSE: Normal
OPEN: External interlock stop
2
3
IN
Pump start
CLOSE: Run
OPEN: Stop
4
IN
Remote emergency shutdown
CLOSE: Normal
OPEN: Emergency shutdown
5
IN
Alarm
reset
CLOSE: Reset
6
IN
WATING MODE
＊
It dose not use it in the LR/HR Series.
7
IN
Seal gas valve
CLOSE: Valve open
OPEN: Valve close
8
9
OUT
DRP start check
CLOSE: Running
OPEN:
At stop
10
OUT
MBP start check
CLOSE: Running
OPEN:
At stop
11
OUT
REMOTE/LOCAL status check
CLOSE: Remote
OPEN: Local
12
OUT
Emergency shutdown status check
CLOSE: Normal
OPEN: At emergency stop
13
OUT
WATING MODE check
＊
It dose not use it in the LR/HR Series.
14
OUT
Ready check
CLOSE: Ready
OPEN: Under preparation
15
OUT
Alarm
s
in a batch
CLOSE: Normal
OPEN: Alarm
16
OUT
Warning
s
in a batch
CLOSE: Normal
OPEN: Warning
17
18
19
OUT
OUT 9
-
16 COM
20
IN
IN 1 COM
21
22
IN
IN
3
-
7
COM
23
24
OUT
Purge gas warning
CLOSE: Normal
OPEN: Warning
25
OUT
Cooling water warning
CLOSE: Normal
OPEN: Warning
26
OUT
DRP temperature warning
CLOSE: Normal
OPEN: Warning
27
OUT
MBP temperature warning
1)
CLOSE: Normal
OPEN: Warning
28
OUT
DRP current value alarm
CLOSE: Normal
OPEN: Alarm
29
OUT
DRP
current value warning
CLOSE: Normal
OPEN:
Warning
30
OUT
MBP current value alarm
CLOSE: Normal
OPEN: Alarm
31
OUT
MBP current value warning
CLOSE: Normal
OPEN: Warning
32
OUT
Pumping pressure alarm
1)
CLOSE: Normal
OPEN: Alarm
33
OUT
Pumping pressure
warning
1)
CLOSE: Normal
OPEN: Warning
34
OUT
System error
CLOSE: Normal
OPEN: Alarm
35
36
37
OUT
OUT 24
-
34 COM
1) Do not use it in the LR series.
2) Do not connect to PIN No. 2, 8, 17, 18, 21, 23, 35, 36.
. Specifications
Pump
side c
onnector
D
-
sub 37pin female
Compatible connector
D
-
sub 37pin
male
Compatible wire size
AWG #22
U
se the shielded cable.