Ulvac LR Series - How to Respond; Others

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3.8.2 Setting the seal gas flow rate
The seal gas flow rate is controlled by a fixed orifice. Gas flows at a rate of 5.0 SLM
within the range of 0.05 to 0.1 MPa. Regulation is not required.
3.8.3 Setting the gas ballast gas flow rate (in mode 3)
After the pump has started, set the gas ballast gas flow rate according to the
process.
- If gas ballast gas is fed, the ultimate pressure will higher
(about 10 Pa at 45 SLM).
For the adjustment, use the gas ballast gas-regulating valve on the front
panel.
3.8.4 Setting the cooling water flow rate
- If the pump is operated for a long time with insufficient
cooling water, the pump may fail. Always feed cooling
water at the prescribed flow rate.
- Regulate the cooling water flow rate to 5.0 L/min or more
using the primary pressure or cooling water flow rate control
valve in the system.
3.9 Operation
Please contact with your nearest service center in order to avoid occurring an
alarm or a failure, if the pump can be used under following conditions.
- Don’t use the pump under a continuous heavy load (e.g. a
slow pumping) for a long time in a tact operation. In this case,
the pump may be broken down due to a heavy load. The
pump was designed in order to evacuate a closed vacuum
chamber without a leak.
- Don’t use the pump under a continuous heavy load for more
than one minute at a start-up. .If the pump cannot reach the
stationary rotational frequency within one minute at a start-
up, the pump will be stopped due to working a protection
circuit of an inverter. An alarm of “MBP Power E alarm” is
displayed in the controller, and the pump will be stopped.
CAUTION
CAUTION
CAUTION