Ulvac LR Series - Earthquake Resistant Measures

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2.2.5 Earthquake Resistant Measures
- To provide earthquake resistance, the pump should be tightly
fixed according to the diagram below. If it is loosely installed,
then the pump could topple or move and will produce damages
for peripheral devices.
- Piping for vacuum, cooling water, nitrogen, and wiring, should
be constructed so that they can absorb vibration and should not
produce damages on piping or run off within defined vibration
level.
Earthquake-proof strength was examined based on the demands postulated of
1997 version United States union construction standard (UBC).
Please refer to the next table for a fall moment, the horizontal load, and the center
of gravity position.
WARNING