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Ulvac LR Series - Page 48

Ulvac LR Series
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37
■ - Installation protection cover to the exhaust heating element.
■- Specification for Connection : refer to 1.3 Dimensional Drawings.
■- Compatible Piping : Use pipe materials which compatible with your local
rules and laws concerning to safety.
Piping should not produce rust. Heat resistance
performance should be more than 100°C.