Ulvac LR Series - For Safety Use

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For Safety Use
-This LR/HR series models are maintenance free except when to connect with the
host equipment, or disconnect from it, and to regulate N2 gas flow at the time of
operation. Overhaul or repair work is performed at ULVAC. When any trouble
occurs, please contact with your local ULVAC service center (please refer to the
ULVAC address list at the end of this manual).
- The interlock system and control system of the LR/HR series pumps are expected
to be connected with the host equipment.
- The LR/HR series pumps are integrated into a host machine or are located close
to the host machine (not more than 3m of travel to the next EMO button).
- Connect the power line of the LR/HR series with the EMO system of the host equipment.
- The gas which can be exhausted with this LR/HR series pump, it provides for
inert gas(Air,N2,Ar).
- Do not exhaust other gases (toxicity gas, combustion gas, corrosion gas, and
explosiveness gas).
- Set up this LR/HR series pump at ventilated room.
- These products are manufactured to conform with laws applied at the time of the
preparation of this manual. When the applied laws are revised in the future, the
legality of these products will not be ensured.
- If the host equipment of these products does not conform to the same laws, or if
the products are modified, then the performance and safety of these products
should not be insured. ULVAC should not have a responsibility in such a case.
- Personnel who have no record of formal safety training course regarded by your
government (safety for electricity, cargo handling, etc) should not operate these
products. Operator should have finished these-safety training course.
- Installation and operation of these products should be performed according to the
applicable local safety codes and laws (e.g. fire fighting law, electric installation code, etc).
- Before starting installation or removal work of this products, shut off all the
energy sources (electricity, compressed air, cooling water, etc.).