Ulvac LR Series - Page 33

22
0.0
5.0
10.0
15.0
20.0
25.0
30.0
1.00E-01 1.00E+00 1.00E+01 1.00E+02 1.00E+03 1.00E+04 1.00E+05
Inret pressure （Pa)
Current （A)
LR60
HR60
LR90
HR90
LR180
HR180
0.0
5.0
10.0
15.0
20.0
25.0
30.0
35.0
40.0
45.0
50.0
1.00E-01 1.00E+00 1.00E+01 1.00E+02 1.00E+03 1.00E+04 1.00E+05
Inret pressure （Pa)
Current （A)
LR300
HR300
LR600
HR600
LR1200
HR1200
LR1800
HR1800
Current - pressure curve
(Primary pump units)
Current - pressure curve
(Booster pump units)