Ulvac LR Series - Inspection And Maintenance; Inspection; Maintenance

60
MODEL No.14 HR90
Name Alarm
set
value
Higher/lower
limit alarm
Warning
time
Alarm
time
Monitor range
1 N2 purge gas 0.5
SLM
Lower limit
alarm
5 sec fixed 180 sec
5 sec after run to run
stop
2 OP_N2 purge gas 0.0
SLM
Lower limit
alarm
5 sec fixed 0 sec
5 sec after run to run
stop
3 Cooling water 4.0
L/min
Lower limit
alarm
5 sec fixed 180 sec
5 sec after run to run
stop
4 Pumping pressure
WARNING
0.120
MPa
Higher limit
alarm fixed
10 sec
5 sec after run to run
stop
5 Pumping pressure
ALARM
0.130
MPa
Higher limit
alarm fixed
2 sec 5 sec after run
to run
stop
6 DRP_INV frequency Intermediate revolution 0000 rpm, rated revolution 0000 rpm
7 MBP_INV frequency Intermediate revolution 0000 rpm, rated revolution 0000 rpm
8 Analog input spare
1
(10V)
0 V
Lower limit
alarm
5 sec fixed 0 sec 5 sec after
run to run
stop
9 Analog input spare
2
(10 V)
0 V
Lower limit
alarm
5 sec fixed 0 sec
5 sec after run to run
stop
10 DRP current
WARNING
13.6A
Higher alarm
fixed
10 sec
15 min after run to
run stop
11 DRP current
ALARM
15.6A
Higher limit
alarm fixed
10 sec
3 min after run to run
stop
12 MBP current
WARNING
0.0 A
Higher limit
alarm fixed
10 sec
5 sec after run to run
stop
13 MBP current
ALARM
0.0 A
Higher limit
alarm fixed
10 sec
5 sec after run to run
stop
14
BOX analog input
spare 1 (10 V)
0 V
Lower limit
alarm
5 sec fixed 0 sec
5 sec after run to run
stop
15
BOX analog input
spare 2 (10 V)
0 V
Lower limit
alarm
5 sec fixed 0 sec
5 sec after run to run
stop
16 DRP temperature
Higher limit 120 C
Ready 70 C
Heater control 0℃
5 sec fixed 180 sec
5 sec after run to run
stop
17 MBP temperature
Higher limit 0 C
Ready 0 C
Heater control 0℃
5 sec fixed 0 sec
5 sec after run to run
stop
18 Exhaust pipe
temperature
Higher limit 120 C
Ready 0 C
Heater control 100℃
5 sec fixed 180 sec 5 sec after
run to run
stop
19 Option temperature
Higher limit 0 C
Ready 0 C
Heater control 0℃
5 sec fixed 0 sec
5 sec after run to run
stop
20 Spare switch on box
B contact open alarm
fixed
5 sec fixed 0 sec
5 sec after run to run
stop
21 Run mode 3
22 Optional valve None
23 Auto purge time 600 sec
24 A/B contact B contact
25 English/Japanese English
26 Baud rate setting 9600 bps
27 RS485 address setting 00
28 Start check 1